US Patent No. 9,923,017

MONOLITHIC ACTIVE PIXEL RADIATION DETECTOR WITH SHIELDING TECHNIQUES


Patent No. 9,923,017
Issue Date March 20, 2018
Title Monolithic Active Pixel Radiation Detector With Shielding Techniques
Inventorship Grzegorz W. Deptuch, Forest Park, IL (US)
Assignee Fermi Research Alliance, LLC, Batavia, IL (US)

Claim of US Patent No. 9,923,017

1. A radiation detector, comprising:
a processing circuit configured from a wafer substrate having a silicon layer configured thereon, wherein said wafer substrate
comprises an SOI (Silicon-On-Insulator) wafer and wherein said wafer substrate possesses a high resistivity and wherein said
silicon layer comprises a thick silicon layer;

at least one first island among a plurality of islands implanted in said silicon layer on top of said wafer substrate to form
locations for a first conductivity type transistor;

at least one second island of a second conductivity type transistor having a doping type opposite to that of said at least
one first island, wherein said plurality of islands includes said at least one first island and said at least one second island;

wherein said second conductivity type transistor is embedded in said at least one island of said opposite doping type;
wherein connections through said silicon layer to diodes are located in said wafer substrate to implement detector electronics
and shielding thereof by said silicon layer; and

a plurality of layers comprising metallization layers used for interconnections in said processing circuit and layers, said
plurality of layers further comprising aggregated layers of a dielectric material constituting an isolation between said metallization
layers used for said interconnections in said processing circuit and wherein said plurality of layers further includes a layer
comprising a metallization lines that brings charge signals to said first and second conductivity type transistors, wherein
said first and second conductivity types transistors comprise transistors that constitute signal processing circuitry of said
processing circuit.