US Patent No. 9,835,924

SILICON BASED TERAHERTZ FULL WAVE LIQUID CRYSTAL PHASE SHIFTER


Patent No. 9,835,924
Issue Date December 05, 2017
Title Silicon Based Terahertz Full Wave Liquid Crystal Phase Shifter
Inventorship Chao-Kuei Lee, Kaohsiung (TW)
Han-Wei Zhang, Kaohsiung (TW)
Tsung-Hsien Lin, Kaohsiung (TW)
Chun-Ta Wang, Kaohsiung (TW)
Jun-Ting Guo, Kaohsiung (TW)
Assignee National Sun Yat-Sen University, Kaohsiung (TW)

Claim of US Patent No. 9,835,924

1. A silicon based terahertz full wave liquid crystal phase shifter, comprising:
a first silicon conductive substrate including a first inner surface and a first outer surface opposite to the first inner
surface, wherein the first inner surface includes a first cell portion and a first conductive portion located at a side of
the first cell portion;

a second silicon conductive substrate including a second inner surface facing the first inner surface and a second outer surface
opposite to the second inner surface, wherein the second inner surface includes a second cell portion and a second conductive
located at a side of the second cell portion;

a plurality of pads stacked between the first cell portion and the second cell portion to form a space; and
a liquid crystal filled in the space.