US Patent No. 9,832,887

MICRO MECHANICAL ANCHOR FOR 3D ARCHITECTURE


Patent No. 9,832,887
Issue Date November 28, 2017
Title Micro Mechanical Anchor For 3d Architecture
Inventorship Liang Wang, Milpitas, CA (US)
Ilyas Mohammed, Santa Clara, CA (US)
Belgacem Haba, Saratoga, CA (US)
Assignee Invensas Corporation, San Jose, CA (US)

Claim of US Patent No. 9,832,887

1. A method of forming a component, comprising:
forming metal anchoring elements at a first surface of a support element having oppositely facing first and second surfaces,
the support element having a thickness extending in a first direction between the first and second surfaces, wherein each
anchoring element has an overhang surface, the metal anchoring elements comprising metal elements that are each supported
by a structure, each metal element having an upper surface facing away from the first surface and a lower surface remote from
the upper surface, wherein a portion of the lower surface, which extends beyond the structure which supports each metal element
respectively, defines the overhang surface;

then forming posts in corresponding openings of a mold overlying the anchoring elements respectively, the posts having first
ends proximate the first surface and second ends disposed above the first ends respectively and above the first surface,

wherein a laterally extending portion of each post contacts at least a first area of the overhang surface of the anchoring
element respectively; and

removing the mold to expose the posts above the first anchoring elements, wherein each said post projects above an exterior
surface of the component and is configured for insertion into and electrical connection with a corresponding electrically
conductive socket at an exterior surface of a separate second component which surface faces the exterior surface of the component,
wherein the component and the separate second component are each one of a microelectronic element, package substrate, interposer
or circuit panel, and

wherein the overhang surface of the anchoring element resists axial and shear forces applied to the posts at positions above
the anchoring elements, the axial and shear forces including those caused by removal of the mold.