US Patent No. 9,818,577

MULTI MODE SYSTEM WITH A DISPERSION X-RAY DETECTOR


Patent No. 9,818,577
Issue Date November 14, 2017
Title Multi Mode System With A Dispersion X-ray Detector
Inventorship Alon Litman, Nes-Ziona (IL)
Efim Vinnitsky, Ashkelon (IL)
Assignee APPLIED MATERIALS ISRAEL LTD., Rehovot (IL)

Claim of US Patent No. 9,818,577

1. A method for evaluating a specimen, comprising:
positioning an energy dispersive X-ray (EDX) detector at a first position, the EDX detector including an EDX detector amplifier
and an EDX detector conduit, the EDX detector conduit surrounding an EDX detector conductor that is coupled between an x-ray
sensitive element of the EDX detector and the EDX detector amplifier, wherein the EDX detector conduit comprises an upper
horizontal portion, a lower horizontal portion, and a sloped intermediate portion that is coupled between the upper horizontal
portion and the lower horizontal portion, and with the EDX detector at the first position:

scanning a flat surface of the specimen by a charged particle beam that exits from a charged particle beam optics tip and
propagates through an aperture located at a tip of the EDX detector; and

detecting, by the x-ray sensitive element of the EDX detector, x-ray photons emitted from the flat surface as a result of
scanning the flat surface with the charged particle beam;

thereafter, positioning the EDX detector at a second position in which a distance between the tip of the EDX detector and
a plane of the flat surface exceeds a distance between the plane of the flat surface and the charged particle beam optics
tip; and

wherein a projection of the tip of the EDX detector on the plane of the flat surface virtually falls on the flat surface when
the EDX detector is positioned at the first position and when the EDX detector is positioned at the second position.