US Patent No. 9,750,091

APPARATUS AND METHOD FOR HEAT TREATMENT OF COATINGS ON SUBSTRATES


Patent No. 9,750,091
Issue Date August 29, 2017
Title Apparatus And Method For Heat Treatment Of Coatings On Substrates
Inventorship Iftikhar Ahmad, Raleigh, NC (US)
Clayton R. DeCamillis, Raleigh, NC (US)
Robert J Schauer, Durham, NC (US)
James E. Neville, Springfield, NJ (US)
Assignee APPLIED MATERIALS, INC., Santa Clara, CA (US) HELLER INDUSTRIES, INC., Fl...

Claim of US Patent No. 9,750,091

1. An apparatus for thermal treatment of coatings on substrates for electronics applications, comprising:
a microwave applicator cavity;
a microwave power supply to deliver power to said microwave applicator cavity;
a thermally insulated microwave-transparent compartment within said microwave applicator cavity, said compartment being large
enough to contain said coated substrate while occupying no more than 50% of the total volume of said microwave applicator
cavity, wherein said microwave applicator cavity further comprises slots on opposite sides to allow said coated substrate
to pass through said microwave applicator cavity;

a means of supporting said coated substrate within said compartment;
an adjustable IR heating source contained within said compartment and facing said coated substrate so that a selected amount
of IR heating may be applied to said coated substrate; wherein the adjustable IR heating source operates independently of
said microwave power supply and further comprises a means of adjusting the distance between said coated substrate and said
IR heating source according to at least one of a process recipe or a feedback system; and,

a non-contacting temperature measurement device to measure the temperature of said coating on said coated substrate.