US Patent No. 9,673,024

PARTICLE-OPTICAL SYSTEMS AND ARRANGEMENTS AND PARTICLE-OPTICAL COMPONENTS FOR SUCH SYSTEMS AND ARRANGEMENTS


Patent No. 9,673,024
Issue Date June 06, 2017
Title Particle-optical Systems And Arrangements And Particle-optical Components For Such Systems And Arrangements
Inventorship Rainer Knippelmeyer, Utting am Ammersee (DE)
Oliver Kienzle, Jena (DE)
Thomas Kemen, Aalen (DE)
Heiko Mueller, Heidelberg (DE)
Stephan Uhlemann, Heidelberg (DE)
Maximilian Haider, Gaiberg (DE)
Antonio Casares, Aalen (DE)
Steven Rogers, D.N. Emek Sorek (IL)
Assignee Applied Materials Israel, Ltd., Rehovot (IL) Carl Zeiss Microscopy GmbH, ...

Claim of US Patent No. 9,673,024

1. A particle-optical arrangement, comprising:
at least one charged-particle source for generating at least one beam of charged particles;
at least one multi-aperture plate having a plurality of apertures formed in the multi-aperture plate, wherein the plurality
of apertures being arranged in a first pattern, wherein a plurality of charged-particle beamlets is formed from the beam of
charged particles downstream of the multi-aperture aperture plate;

a first focusing lens providing a focusing field in a first region between the charged-particle source and the multi-aperture
plate; and

a decelerating electrode providing a decelerating field in a second region in between the first focusing lens and the multi-aperture
plate, such that a kinetic energy of the charged particles passing the first focusing lens is higher than a kinetic energy
of the charged particles passing the multi-aperture plate.