US Patent No. 9,490,602

LASER SYSTEM ABLE TO ESTIMATE HERMETIC SEAL OF LASER GAS CONTAINER


Patent No. 9,490,602
Issue Date November 08, 2016
Title Laser System Able To Estimate Hermetic Seal Of Laser Gas Container
Inventorship Akihiko Nishio, Yamanashi (JP)
Assignee Fanuc Corporation, Yamanashi (JP)

Claim of US Patent No. 9,490,602

1. A laser system comprising:
a laser gas container forming a gas channel through which laser gas circulates,
a laser oscillator oscillating laser light by using laser gas flowing through the gas channel as an excitation medium,
a gas pressure detector detecting a laser gas pressure in the laser gas container,
a pressure adjusting part adjusting the laser gas pressure in the laser gas container based on a value detected by the gas
pressure detector,

a pressure control unit controlling the pressure adjusting part so that when shutdown of the laser oscillator is instructed,
the laser gas pressure in the laser gas container becomes a first gas pressure lower than atmospheric pressure and so that
at a preparatory stage after startup of the laser oscillator and before radiation of the laser light to an outside, the laser
gas pressure in the laser gas container becomes a second gas pressure capable of oscillating laser light,

a laser control unit controlling the laser oscillator so that the laser oscillator executes an initial operation in which
the laser oscillator outputs laser light in accordance with a predetermined oscillation condition at the preparatory stage,

a laser detector detecting an output of the laser light in the initial operation of the laser oscillator or a physical quantity
having a correlative relationship with the output of the laser light in the initial operation of the laser oscillator, and

a hermetic seal estimating part estimating an extent of leakage in the hermetic seal of the laser gas container based on a
detection value obtained by the laser detector.