US Patent No. 9,362,482

METHOD OF PRODUCING PIEZOELECTRIC DEVICE USING BE, FE AND CO UNDER EXCESS OXYGEN ATMOSPHERE


Patent No. 9,362,482
Issue Date June 07, 2016
Title Method Of Producing Piezoelectric Device Using Be, Fe And Co Under Excess Oxygen Atmosphere
Inventorship Makoto Kubota, Yokohama (JP)
Kenji Takashima, Saitama (JP)
Masaki Azuma, Kyoto (JP)
Yoshitaka Nakamura, Kyoto (JP)
Yuichi Shimakawa, Kyoto (JP)
Takashi Iijima, Tsukuba (JP)
Bong-Yeon Lee, Tsukuba (JP)
Assignee CANON KABUSHIKI KAISHA, Tokyo (JP) KYOTO UNIVERSITY, Kyoto (JP)

Claim of US Patent No. 9,362,482

1. A method of producing a piezoelectric device comprising a substrate bearing a piezoelectric material and a pair of electrodes
provided to contact the piezoelectric material, the method comprising:
subjecting a raw material comprising Bi, Fe and Co to a heat treatment at 430° C. or lower under an atmosphere comprising
at least 25 vol % oxygen to obtain a piezoelectric material formed of a perovskite-type metal oxide represented by formula
(1):

Bix(Fe1-yCoy)O3  (1)

where 0.95?x?1.25 and 0.10?y?0.30.