US Patent No. 9,304,036

BEAM PROFILER MEASURING INTENSITY DISTRIBUTION OF LASER BEAM, LASER OSCILLATOR, AND LASER PROCESSING DEVICE


Patent No. 9,304,036
Issue Date April 05, 2016
Title Beam Profiler Measuring Intensity Distribution Of Laser Beam, Laser Oscillator, And Laser Processing Device
Inventorship Takashi Izumi, Yamanashi (JP)
Assignee FANUC CORPORATION, Yamanashi (JP)

Claim of US Patent No. 9,304,036

1. A beam profiler for measuring an intensity distribution of a laser beam, comprising:
a partial reflecting mirror;
a plurality of light receiving parts receiving a laser beam passing through the partial reflecting mirror; and
a plurality of laser intensity sensors individually attached to the plurality of light receiving parts and sensing the intensity
of the laser beam received by the light receiving parts, wherein

the plurality of light receiving parts at least includes:
a first light receiving part receiving a first region of a laser irradiation region of the laser beam, the first region having
a center part of the laser beam; and

a second light receiving part thermally-insulated from the first light receiving part and receiving a second region of the
laser irradiation region which is different from the first region.