US Patent No. 9,287,318

SOLID-STATE IMAGING SENSOR, METHOD OF MANUFACTURING THE SAME, AND CAMERA


Patent No. 9,287,318
Issue Date March 15, 2016
Title Solid-state Imaging Sensor, Method Of Manufacturing The Same, And Camera
Inventorship Yasuhiro Sekine, Yokohama (JP)
Assignee Canon Kabushiki Kaisha, Tokyo (JP)

Claim of US Patent No. 9,287,318

1. A solid-state imaging sensor which has a first face and a second face on an opposite side of the first face, and includes
an image sensing region in which a plurality of photoelectric conversion portions are arrayed and an electrode region, comprising:
in a direction from the second face to the first face,
a first portion including an insulating member and a wiring pattern provided in the insulating member;
a second portion including the plurality of photoelectric conversion portions in the image sensing region; and
a third portion including a plurality of microlenses corresponding to the plurality of photoelectric conversion portions in
the image sensing region,

wherein an opening is formed on the side of the first face in the electrode region so that the wiring pattern is exposed,
and

the solid-state imaging sensor includes
a first film provided to cover the plurality of microlenses in the image sensing region and to not cover a side face of the
opening, and

a second film provided to cover the side face of the opening and expose at least part of the wiring pattern in the electrode
region while covering the first film in the image sensing region.