US Patent No. 9,287,147

SUBSTRATE SUPPORT WITH ADVANCED EDGE CONTROL PROVISIONS


Patent No. 9,287,147
Issue Date March 15, 2016
Title Substrate Support With Advanced Edge Control Provisions
Inventorship Kyle Tantiwong, San Jose, CA (US)
Samer Banna, San Jose, CA (US)
Assignee APPLIED MATERIALS, INC., Santa Clara, CA (US)

Claim of US Patent No. 9,287,147

1. A substrate support, comprising:
a supporting body having an outer wall;
a ground path disposed against and bounding the outer wall of the supporting body;
a mounting plate coupled to a lower surface of the supporting body, wherein the mounting plate includes a lip extending outward
from the mounting plate defining an upper surface; and

a recess formed at a perimeter of the supporting body above the upper surface of the lip of the mounting plate, the recess
on the ground path extending at least partially to the mounting plate, wherein the supporting body comprises:

a substrate supporting plate;
a cooling plate coupled to the substrate supporting plate;
an inlet/outlet plate coupled to the cooling plate; and
a base plate coupled to the inlet and outlet plate.