US Patent No. 9,283,761

INK-JET RECORDING HEAD, RECORDING ELEMENT SUBSTRATE, METHOD FOR MANUFACTURING INK-JET RECORDING HEAD, AND METHOD FOR MANUFACTURING RECORDING ELEMENT SUBSTRATE


Patent No. 9,283,761
Issue Date March 15, 2016
Title Ink-jet Recording Head, Recording Element Substrate, Method For Manufacturing Ink-jet Recording Head, And Method For Manufacturing Recording Element Substrate
Inventorship Hirotaka Miyazaki, Yokohama (JP)
Assignee Canon Kabushiki Kaisha, Tokyo (JP)

Claim of US Patent No. 9,283,761

1. A method for manufacturing a plurality of recording element substrates, the method comprising:
preparing a silicon wafer to include the plurality of recording element substrates, each recording element substrate including
energy generating element groups for generating energy used for ejecting a liquid; and

dividing, by dry etching, the silicon wafer so as to separate the recording element substrates from each other, each recording
element substrate including the energy generating element groups.