Patent No. | 9,277,858 |
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Issue Date | March 08, 2016 |

Title | Aberration Correcting Method And Aberration Correcting Apparatus |

Inventorship | Koji Nozato, Rochester, NY (US) Kohei Takeno, Yokohama (JP) |

Assignee | Canon Kabushiki Kaisha, Tokyo (JP) |

1. An aberration correcting method comprising:

measuring, using an aberration measuring unit, a wavefront aberration of reflected light acquired by irradiating measurement

light on a subject, the wavefront aberration being measured as phase information at each of a plurality of aberration measurement

points of the aberration measuring unit;

measuring, using the aberration measuring unit, wavefront gradient information at each of the aberration measurement points;

and

driving an aberration correction unit having a number of pixels greater than the number of the plurality of aberration measurement

points, wherein driving the aberration correction unit comprises:

driving first pixels of the aberration correction unit positionally corresponding to the aberration measurement points based

on the phase information being measured, and

driving second pixels of the aberration correction unit not positionally corresponding to the aberration measurement points

based on (i) the phase information being measured at the aberration measurement points corresponding to each of the first

pixels in the vicinity of each of the second pixels, (ii) the gradient information being measured at aberration measurement

points corresponding to each of the first pixels in the vicinity of each of the second pixels, and (iii) a distance between

each of the first pixels in the vicinity of each of the second pixels and each of the second pixels.

measuring, using an aberration measuring unit, a wavefront aberration of reflected light acquired by irradiating measurement

light on a subject, the wavefront aberration being measured as phase information at each of a plurality of aberration measurement

points of the aberration measuring unit;

measuring, using the aberration measuring unit, wavefront gradient information at each of the aberration measurement points;

and

driving an aberration correction unit having a number of pixels greater than the number of the plurality of aberration measurement

points, wherein driving the aberration correction unit comprises:

driving first pixels of the aberration correction unit positionally corresponding to the aberration measurement points based

on the phase information being measured, and

driving second pixels of the aberration correction unit not positionally corresponding to the aberration measurement points

based on (i) the phase information being measured at the aberration measurement points corresponding to each of the first

pixels in the vicinity of each of the second pixels, (ii) the gradient information being measured at aberration measurement

points corresponding to each of the first pixels in the vicinity of each of the second pixels, and (iii) a distance between

each of the first pixels in the vicinity of each of the second pixels and each of the second pixels.