US Patent No. 9,263,485

SOLID-STATE IMAGING APPARATUS AND METHOD FOR MANUFACTURING THE SAME


Patent No. 9,263,485
Issue Date February 16, 2016 
Title Solid-state Imaging Apparatus And Method For Manufacturing The Same
Inventorship Mariko Furuta, Yokohama (JP)
Assignee CANON KABUSHIKI KAISHA, Tokyo (JP)

Claim of US Patent No. 9,263,485

1. A solid-state imaging apparatus having a pixel area including a plurality of light receiving elements, comprising:
a semiconductor substrate in which the plurality of light receiving elements are formed, and
an air gap layer arranged above the semiconductor substrate, and including a plurality of portions arranged correspondingly
to the plurality of light receiving elements and air gaps arranged between the plurality of portions and having a refractive
index lower than that of the plurality of portions, wherein

a width of the air gaps gradually increases from a central region in the pixel area toward a peripheral region in the pixel
area, the widths are to be measured at the same point along the height of each of the air gaps.