US Patent No. 9,261,363

YAW RATE SENSOR


Patent No. 9,261,363
Issue Date February 16, 2016 
Title Yaw Rate Sensor
Inventorship Reinhard Neul, Stuttgart (DE)
Johannes Classen, Reutlingen (DE)
Axel Franke, Ditzingen (DE)
Marco Quander, Gerlingen (DE)
Joerg Hauer, Reutlingen (DE)
Udo-Martin Gomez, Leonberg (DE)
Kersten Kehr, Zwota (DE)
Assignee ROBERT BOSCH GMBH, Stuttgart (DE)

Claim of US Patent No. 9,261,363

11. A yaw rate sensor, comprising:
a drive mass element arranged above a surface of a substrate and drivable to vibrate by a drive device along a first axis
extending along the surface; a detection mass element deflectable along a second axis under the influence of a Coriolis force;
and a detection device adapted to detect deflection of the detection mass element along the second axis; wherein the second
axis extends perpendicular to the surface;

an additional drive mass element arranged above the surface and drivable by an additional drive device along the first axis;
an additional detection mass element deflectable under the influence of the Coriolis force along the second axis extending
perpendicular to the surface; and an additional detection device adapted to detect deflection of the additional detection
mass element along the second axis;

wherein the detection mass element and the additional detection mass element are coupled to one another by at least one coupling
spring,

wherein centers of gravity of the drive mass elements and the detection mass elements coincide in a resting position.