US Patent No. 9,224,777

SOLID-STATE IMAGE PICKUP DEVICE AND METHOD FOR MANUFACTURING SOLID-STATE IMAGE PICKUP DEVICE


Patent No. 9,224,777
Issue Date December 29, 2015
Title Solid-state Image Pickup Device And Method For Manufacturing Solid-state Image Pickup Device
Inventorship Tadashi Sawayama, Machida (JP)
Hiroshi Ikakura, Kawasaki (JP)
Takaharu Kondo, Yokohama (JP)
Toru Eto, Ebina (JP)
Assignee CANON KABUSHIKI KAISHA, Tokyo (JP)

Claim of US Patent No. 9,224,777

1. A method for manufacturing a solid-state image pickup device that includes
a substrate including a photoelectric conversion unit, and
a waveguide arranged on the substrate, and including a plurality of insulating films having an opening and a member comprising
a first silicon nitride film and a second silicon nitride film, the member being arranged in the opening in such a manner
as to correspond to the photoelectric conversion unit, the method comprising:

a first step and a second step,
wherein in the first step, the first silicon nitride film is formed in the opening by a high-density plasma-enhanced chemical
vapor deposition apparatus including an upper electrode and a lower electrode,

wherein after the first step, in the second step, the second silicon nitride film is formed by the high-density plasma-enhanced
chemical vapor deposition apparatus under conditions in which a ratio of a radio-frequency power of the lower electrode to
a radio-frequency power of the upper electrode is higher than that in the first step.