US Patent No. 9,173,281

METHODS OF FABRICATING ELECTRODE SENSOR


Patent No. 9,173,281
Issue Date October 27, 2015
Title Methods Of Fabricating Electrode Sensor
Inventorship Yong Hee Kim, Daejeon (KR)
Sang Don Jung, Daejeon (KR)
Nam Seob Baek, Daejeon (KR)
Gookhwa Kim, Jeonju (KR)
Assignee Electronics and Telecommunications Research Institute, Daejeon (KR)

Claim of US Patent No. 9,173,281

1. A method of fabricating an electrode sensor, comprising:
providing a substrate with a first electrode;
forming a resist layer on the substrate to cover the first electrode;
patterning the resist layer to expose a portion of the first electrode;
forming an insulating layer on the substrate;
removing the insulating layer on the resist layer and the resist layer to form a well in the insulating layer; and
forming a second electrode in the well to be electrically connected to the first electrode.