US Patent No. 9,165,957

DETECTING DEVICE, DETECTING SYSTEM, AND MANUFACTURING METHOD OF DETECTING DEVICE


Patent No. 9,165,957
Issue Date October 20, 2015
Title Detecting Device, Detecting System, And Manufacturing Method Of Detecting Device
Inventorship Keigo Yokoyama, Honjo (JP)
Minoru Watanabe, Honjo (JP)
Masato Ofuji, Takasaki (JP)
Jun Kawanabe, Kumagaya (JP)
Kentaro Fujiyoshi, Tokyo (JP)
Hiroshi Wayama, Saitama (JP)
Assignee CANON KABUSHIKI KAISHA, Tokyo (JP)

Claim of US Patent No. 9,165,957

1. A detecting device, comprising:
a detecting device including
a substrate,
a pixel electrode formed of a transparent conductive oxide,
an impurity semiconductor portion, and
a semiconductor portion,
wherein the pixel electrode, impurity semiconductor portion, and semiconductor portion are formed upon the substrate in that
order from the substrate side;

wherein the impurity semiconductor portion includes
a first region including a place in contact with the pixel electrode, and
a second region situated nearer to the semiconductor portion than the first region;
and wherein a concentration of a dopant in the second region is higher than a concentration of a dopant in the first region.