US Patent No. 9,159,902


Patent No. 9,159,902
Issue Date October 13, 2015
Title Resonator
Inventorship Keisuke Hirano, Saitama (JP)
Noritoshi Kimura, Saitama (JP)
Assignee NIHON DEMPA KOGYO CO., LTD., Tokyo (JP)

Claim of US Patent No. 9,159,902

1. A resonator comprising:
an interdigital transducer electrode, being disposed on a piezoelectric thin film;
a resonance part, being held on a substrate through an air gap;
a supporting part, supporting the resonance part; and
two beam parts, connecting the resonance part to the supporting part at both ends of the resonance part,
wherein, the air gap forms a level difference at the supporting part, or
each beam part includes a thin beam part and an extended beam part, wherein the extended beam part is disposed where the air
gap forms the level difference.