US Patent No. 9,147,994

GAS LASER SYSTEM CAPABLE OF MAINTAINING LASER GAS STATE DURING POWER SUPPLY CUTOFF


Patent No. 9,147,994
Issue Date September 29, 2015
Title Gas Laser System Capable Of Maintaining Laser Gas State During Power Supply Cutoff
Inventorship Ryusuke Miyata, Yamanashi (JP)
Assignee FANUC CORPORATION, Yamanashi (JP)

Claim of US Patent No. 9,147,994

1. A gas laser system comprising:
a laser oscillator including a gas flow path for circulating laser gas, and a gas supply and discharge unit configured to
supply laser gas to the gas flow path and discharge the laser gas from the gas flow path;

a power supply unit configured to supply power to the laser oscillator;
a power storage unit configured to store the power supplied from the power supply unit;
a power reduction detection unit configured to detect a power reduction state where a value of the power supplied from the
power supply unit falls below a power value enabling the laser oscillator to normally operate; and

a control unit configured to control the gas supply and discharge unit by using the power stored in the power storage unit
so as to seal the gas flow path, when the power reduction detection unit detects the power reduction state.