US Patent No. 9,140,671

QUANTITATIVE SENSOR AND MANUFACTURING METHOD THEREOF


Patent No. 9,140,671
Issue Date September 22, 2015
Title Quantitative Sensor And Manufacturing Method Thereof
Inventorship Ying-Chung Chen, Kaohsiung (TW)
Chien-Chuan Cheng, Kaohsiung (TW)
Wei-Tsai Chang, Kaohsiung (TW)
Kuo-Sheng Kao, Kaohsiung (TW)
Re-Ching Lin, Kaohsiung (TW)
Jia-Ming Jiang, Kaohsiung (TW)
Chun-Hung Yang, Kaohsiung (TW)
Assignee National Sun Yat-Sen University

Claim of US Patent No. 9,140,671

1. A quantitative sensor, comprising:
a substrate having a chamber linking two opposite sides of the substrate, with one of the two opposite sides being a coupling
side, wherein the chamber is adapted to be filled with liquid to be detected;

a first electrode layer mounted on the coupling side of the substrate and in communication with the chamber;
a piezoelectric layer mounted on the first electrode layer and having a growing direction, wherein there is an angle between
a surface of the coupling side and the said growing direction, and the angle is 75-45 degrees;

a second electrode layer formed on the piezoelectric layer and separated from the first electrode layer;
a binding metal layer disposed in the chamber and mounted on the first electrode layer; and
a fluid detection metal layer disposed in the chamber and mounted on the binding metal layer.