US Patent No. 9,130,343

GAS LASER OSCILLATOR HAVING FUNCTION OF JUDGING START OF DISCHARGE


Patent No. 9,130,343
Issue Date September 08, 2015
Title Gas Laser Oscillator Having Function Of Judging Start Of Discharge
Inventorship Tooru Nukui, Yamanashi (JP)
Assignee FANUC CORPORATION, Yamanashi (JP)

Claim of US Patent No. 9,130,343

1. A gas laser oscillator comprising:
a discharge tube provided in a gas channel through which a laser gas circulates;
an output command part outputting a power output command value;
a power supply part applying to the discharge tube a discharge tube voltage corresponding to the power output command value
output from the output command part;

a voltage detector detecting the discharge tube voltage; and
a discharge start judging part judging if a discharge has been started in the discharge tube, based on a ratio of change of
the discharge tube voltage detected by the voltage detector relative to the power output command value output from the output
command part,

wherein the output command part increases the power output command value in steps by an increment at a step time interval,
the step time interval being determined at least by:
according to a response time that is required for the power supply part to respond to the power output command value, and
another increment in the power output command value being obtained by:
dividing the power output command value corresponding to a discharge start voltage serving as a predetermined reference by
a number of steps of 2 or more.