US Patent No. 9,122,149

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE


Patent No. 9,122,149
Issue Date September 01, 2015
Title Imprint Apparatus And Method Of Manufacturing Article
Inventorship Hiroshi Sato, Utsunomiya (JP)
Hideki Ina, Tokyo (JP)
Assignee CANON KABUSHIKI KAISHA, (JP)

Claim of US Patent No. 9,122,149

1. An imprint apparatus which cures a resin dispensed on a substrate while the resin and a pattern surface of a mold are in
contact with each other, the mold having a lower surface, an upper surface, and a side surface connecting an outer edge of
the lower surface and an outer edge of the upper surface, and the mold including a porous portion exposed to the side surface
of the mold, the apparatus comprising:
a supply portion configured to communicate only with the side surface of the mold to which the porous portion is exposed,
to supply a gas only to the porous portion such that the gas passes through the porous portion and is exhausted to a space
which the pattern surface of the mold faces; and

a controller configured to control the supply portion to supply the gas to the space before the resin and the pattern surface
of the mold are brought into contact with each other.