US Patent No. 9,065,418

RESONATOR ELECTRODE MATERIAL EXCELLENT IN AGING PROPERTY, PIEZOELECTRIC RESONATOR USING THE SAME MATERIAL, AND SPUTTERING TARGET MADE OF THE SAME MATERIAL


Patent No. 9,065,418
Issue Date June 23, 2015
Title Resonator Electrode Material Excellent In Aging Property, Piezoelectric Resonator Using The Same Material, And Sputtering Target Made Of The Same Material
Inventorship Toshinori Ogashiwa, Hiratsuka (JP)
Masaaki Kurita, Hiratsuka (JP)
Takashi Terui, Tomioka (JP)
Takeyuki Sagae, Tokyo (JP)
Katsunori Akane, Sayama (JP)
Kenzo Okamoto, Sayama (JP)
Kenichi Ueki, Sayama (JP)
Shohei Takeda, Sayama (JP)
Assignee Nihon Dempa Kogyo Co. Ltd., Tokyo (JP) Tanaka Kikinzoko Kogyo K.K., Tokyo...

Claim of US Patent No. 9,065,418

1. A resonator electrode material comprising a ternary alloy composed of Au and two metals M1 and M2, for an excitation electrode to excite oscillation in a piezoelectric element, wherein the metal M1 is Ag; and the metal M2 is at least any one of Pd, Ru, Pt, Ir, Rh and Cu; and further, the Au concentration is 20 to 70% by mass and the total concentration
of M1 and M2 is 80 to 30% by mass.