US Patent No. 9,059,397

NANO PIEZOELECTRIC DEVICE HAVING A NANOWIRE AND METHOD OF FORMING THE SAME


Patent No. 9,059,397
Issue Date June 16, 2015
Title Nano Piezoelectric Device Having A Nanowire And Method Of Forming The Same
Inventorship Jong-Hyurk Park, Daegu (KR)
Assignee ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon (KR)

Claim of US Patent No. 9,059,397

1. A nano piezoelectric device comprising:
a lower electrode;
a nanowire extending upward from the lower electrode; and
an upper electrode on the nanowire;
wherein the nanowire includes a conductive wire core and a wire shell surrounding the wire core and including a piezoelectric
material; and

wherein the conductive wire core and the wire shell have a PN diode junction connected from the lower electrode to the upper
electrode, respectively, not forming a Schottky contact between the nanowire and the upper electrode.