US Patent No. 9,057,968

POSITIONING APPARATUS, EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE


Patent No. 9,057,968
Issue Date June 16, 2015
Title Positioning Apparatus, Exposure Apparatus And Method Of Manufacturing Device
Inventorship Masahiro Ogura, Tokyo (JP)
Noriyasu Hasegawa, Utsunomiya (JP)
Yasuyuki Tamura, Yokohama (JP)
Assignee CANON KABUSHIKI KAISHA, (JP)

Claim of US Patent No. 9,057,968

1. A positioning apparatus for a moving object, the apparatus comprising:
a driving unit including a stator and a movable element connected to the moving object via a connecting member;
a chassis which contains said movable element and said stator in a driving range of said movable element, and includes an
opening which allows movement of the connecting member upon driving of said movable element, and an exhaust outlet which includes
end exhaust outlets arranged at a first end and a second end, respectively, of the driving range;

an exhaust unit which exhausts a gas in said chassis from said exhaust outlet; and
a controller which controls said exhaust unit so that an amount of exhaust from said end exhaust outlet arranged at the first
end becomes larger when said movable element is driven toward the first end on a side of the first end of the driving range
than when said movable element is positioned at the center of the driving range.