US Patent No. 10,993,039

ACOUSTIC MICROELECTRONIC DEVICE


Patent No. 10,993,039
Issue Date April 27, 2021
Title Acoustic Microelectronic Device
Inventorship Stephane Fanget, Le Grand Lemps (FR)
Caroline Coutier, Grenoble (FR)
Philippe Robert, Grenoble (FR)
Assignee

Claim of US Patent No. 10,993,039

1. An acoustic-type microelectronic device comprising a support, a set of at least one membrane suspended on a face of the support above a cavity by an anchoring zone, and at least one acoustic insulation trench arranged adjacent to the membrane, the device comprising at least one bridge connecting the portions of two edges opposite the trench in order to connect the support to the anchoring zone of the membrane, the bridge being located overhanging at least one zone of the trench so as to form, in said zone of the trench, an acoustic insulation box below the bridge.