US Patent No. 10,992,884

IMAGING PANEL AND METHOD FOR PRODUCING SAME


Patent No. 10,992,884
Issue Date April 27, 2021
Title Imaging Panel And Method For Producing Same
Inventorship Katsunori Misaki, Yonago (JP)
Assignee SHARP KABUSHIKI KAISHA, Sakai (JP)

Claim of US Patent No. 10,992,884

1. An imaging panel that generates an image based on scintillation light that is obtained from X-rays transmitted through an object, the imaging panel comprising:a substrate; and
a photoelectric conversion layer that is provided on the substrate and converts scintillation light into charges, wherein
the photoelectric conversion layer has a polygonal shape including a plurality of corner portions when viewed in a plan view,
each of the plurality of corner portions includes a plurality of corners each of which has an interior angle of greater than 90°,
the photoelectric conversion layer includes a first semiconductor layer of a first conductive type, an intrinsic amorphous semiconductor layer in contact with the first semiconductor layer, and a second semiconductor layer of a second conductive type that is opposite to the first conductive type, the second semiconductor layer being in contact with the intrinsic semiconductor layer, and
in the plurality of corner portions, and in an area other than the corner portions, at least an upper end portion of the second semiconductor layer protrudes toward an outer side of the photoelectric conversion layer, with respect to an upper end portion of the intrinsic semiconductor layer.