US Patent No. 10,973,112

CHARGED PARTICLE BEAM DEVICE


Patent No. 10,973,112
Issue Date April 06, 2021
Title Charged Particle Beam Device
Inventorship Ryo Kadoi, Tokyo (JP)
Wen Li, Tokyo (JP)
Naoya Ishigaki, Tokyo (JP)
Assignee HITACHI HIGH-TECH CORPORATION, Tokyo (JP)

Claim of US Patent No. 10,973,112

1. A charged particle beam device comprising:a charged particle source;
an extraction electrode configured to extract a charged particle from the charged particle source;
an extraction-electrode power source configured to apply a voltage to the extraction electrode;
an acceleration electrode configured to accelerate the charged particle;
an acceleration power source configured to apply a voltage to the acceleration electrode;
a diode and a resistor connected in series between a middle stage of the acceleration power source and an output side of the extraction-electrode power source;
a power source control unit configured to control the acceleration power source and the extraction-electrode power source; and
an extraction-electrode power source node switch configured to disconnect the extraction-electrode power source from a circuit, wherein
the power source control unit turns off the extraction-electrode power source node switch when a generation of an abnormality in the extraction-electrode power source is detected,
the extraction-electrode power source voltage detection unit is configured to detect a voltage of the extraction-electrode power source, and
the power source control unit detects the generation of the abnormality in the extraction-electrode power source using the voltage detected by the extraction-electrode power source voltage detection unit.