US Patent No. 10,973,088

OPTICALLY HEATED SUBSTRATE SUPPORT ASSEMBLY WITH REMOVABLE OPTICAL FIBERS


Patent No. 10,973,088
Issue Date April 06, 2021
Title Optically Heated Substrate Support Assembly With Removable Optical Fibers
Inventorship Vijay D. Parkhe, San Jose, CA (US)
Assignee APPLIED MATERIALS, INC., Santa Clara, CA (US)

Claim of US Patent No. 10,973,088

1. A substrate support, comprising:a plate comprising:
a top surface and a bottom surface, wherein the top surface is to support a substrate;
an electrode;
one or more resistive heating elements;
a first plurality of channels;
a recess formed at the bottom surface of the plate, wherein the recess is configured to provide access to each of the first plurality of channels; and
a plurality of optical fibers in the first plurality of channels, wherein the recess is further configured to facilitate removal of one or more of the plurality of optical fibers from the substrate support, and wherein the plurality of optical fibers, in conjunction with the one or more resistive heating elements, control a temperature of one or more portions of the substrate to a target temperature; and
a shaft bonded to the bottom surface of the plate, wherein the shaft surrounds the recess formed at the bottom surface of the plate.