US Patent No. 10,925,143

LASER APPARATUS AND EUV LIGHT GENERATING SYSTEM


Patent No. 10,925,143
Issue Date February 16, 2021
Title Laser Apparatus And Euv Light Generating System
Inventorship Katsuhiko Wakana, Oyama (JP)
Assignee Gigaphoton Inc., Tochigi (JP)

Claim of US Patent No. 10,925,143

1. A laser apparatus comprising:an optical element disposed on a laser beam axis;
an actuator configured to displace the optical element to displace the laser beam axis;
a driving amount monitor configured to monitor a driving amount of the actuator;
an optical axis monitor disposed along the laser beam axis and configured to monitor the laser beam axis; and
a control unit configured to control the actuator based on a monitoring result of the optical axis monitor, and determine abnormality of the optical element based on a monitoring result of the driving amount monitor.