US Patent No. 10,920,318
SHOWER PLATE, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR MANUFACTURING SHOWER PLATE
| Patent No. | 10,920,318 |
|---|---|
| Issue Date | February 16, 2021 |
| Title | Shower Plate, Semiconductor Manufacturing Apparatus, And Method For Manufacturing Shower Plate |
| Inventorship | Yukio Noguchi, Kyoto (JP) Yuuji Kawase, Kyoto (JP) Hiromasa Matsufuji, Kyoto (JP) Kouji Teramoto, Kyoto (JP) |
| Assignee | KYOCERA Corporation, Kyoto (JP) |
Claim of US Patent No. 10,920,318
1. A shower plate, comprising:a ceramic sintered body comprising:
a first surface;
a second surface facing the first surface; and
a through hole positioned between the first surface and the second surface,
wherein
an inner surface of the through hole comprising a protruding crystal grain which protrudes more than an exposed part of a grain boundary phase existing between crystal grains, and
the inner surface of the through hole comprises an arithmetic average roughness in an axial direction of the through hole in a range from 0.3 ?m to 0.6 ?m.
a first surface;
a second surface facing the first surface; and
a through hole positioned between the first surface and the second surface,
wherein
an inner surface of the through hole comprising a protruding crystal grain which protrudes more than an exposed part of a grain boundary phase existing between crystal grains, and
the inner surface of the through hole comprises an arithmetic average roughness in an axial direction of the through hole in a range from 0.3 ?m to 0.6 ?m.