US Patent No. 10,798,810

PLASMA SOURCE


Patent No. 10,798,810
Issue Date October 06, 2020
Title Plasma Source
Inventorship Pascal Sortais, Meylan (FR)
Assignee Polygon Physics, Meylan (FR)

Claim of US Patent No. 10,798,810

1. A plasma source comprising a quarter wave antenna located in a cylindrical enclosure provided with an opening opposite the end of the antenna, wherein:the diameter (d) of the antenna is in the range from one third to one quarter of the inner diameter (d1) of the enclosure,
the distance (l) between the end of the antenna and the opening is in the range from ? to 5/3 of the diameter (d) of the antenna.