US Patent No. 10,716,197

SYSTEM, COMPUTER PROGRAM PRODUCT, AND METHOD FOR DISSIPATION OF AN ELECTRICAL CHARGE


Patent No. 10,716,197
Issue Date July 14, 2020
Title System, Computer Program Product, And Method For Dissipation Of An Electrical Charge
Inventorship Guy Eytan, Kidron (IL)
Emil Weisz, Modiin (IL)
Samuel Ives Nackash, Nes Ziona (IL)
Albert Karabekov, Ashdod (IL)
Assignee APPLIED MATERIALS ISRAEL LTD., Rehovot (IL)

Claim of US Patent No. 10,716,197

1. A method for dissipation of an electrical charge stored in a region of an object, the method comprising:sensing, by at least one sensor that comprises a charged particle detector that is preceded by an adjustable energy filter, an electrical charging status of the region of the object, while the object is located within a vacuum chamber and while a gaseous pressure within the vacuum chamber is below a certain vacuum pressure threshold, wherein sensing the electrical charging status of the region of the object comprises finding a cutoff voltage of electrons that pass through the adjustable energy filter; and
performing, based on the electrical charging status of the region of the object, an electrical charge dissipation process that comprises increasing the gaseous pressure within the vacuum chamber to be within a given gaseous pressure range that facilitates a dissipation, by breakdown, of the electrical charge stored in the region of the object to the vacuum chamber.