US Patent No. 10,659,004

RESONATOR AND RESONANCE DEVICE


Patent No. 10,659,004
Issue Date May 19, 2020
Title Resonator And Resonance Device
Inventorship Yuichi Goto, Nagaokakyo (JP)
Wakana Hirota, Nagaokakyo (JP)
Assignee MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu (JP)

Claim of US Patent No. 10,659,004

1. A resonance device, comprising:an upper lid;
a lower lid that opposes the upper lid; and
a resonator interposed between the upper and lower lids, the resonator including:
a base,
a plurality of vibration arms having respective first and second ends with the respective first ends coupled to a front end of the base, such that the plurality of vibration arms extend in a direction away from the base,
a frame surrounding at least a portion of the base and the plurality of vibration arms, and
at least one holding arm having a first end coupled to the base and a second end coupled to the frame, the second end of the at least one holding arm being closer to the second end of at least one of the plurality of vibration arms than the first end of the at least one of the plurality of vibration arms,
wherein the base, the plurality of vibration arms, and the at least one holding arm include a substrate and a temperature characteristics correction layer disposed on the substrate that comprises a material having a coefficient of thermal expansion different from that of the substrate.