US Patent No. 10,659,002

ELASTIC WAVE DEVICE


Patent No. 10,659,002
Issue Date May 19, 2020
Title Elastic Wave Device
Inventorship Koji Yamamoto, Nagaokakyo (JP)
Tsutomu Takai, Nagaokakyo (JP)
Seiji Kai, Nagaokakyo (JP)
Hisashi Yamazaki, Nagaokakyo (JP)
Yuji Miwa, Nagaokakyo (JP)
Takashi Yamane, Nagaokakyo (JP)
Noriyoshi Ota, Nagaokakyo (JP)
Atsushi Tanaka, Nagaokakyo (JP)
Assignee MURATA MANUFACTURING CO., LTD., Kyoto (JP)

Claim of US Patent No. 10,659,002

1. An elastic wave device comprising:a support substrate;
a lamination layer film provided on the support substrate and including a plurality of films including a piezoelectric thin film;
an interdigital transducer (IDT) electrode provided on one surface of the piezoelectric thin film;
a first insulation layer provided in a region located at an outer side portion of a region where the IDT electrode is provided and extending from at least a portion of a region where the lamination layer film is not present to an upper portion of the piezoelectric thin film in a plan view; and
a wiring electrode electrically connected to the IDT electrode, extending from the upper portion of the piezoelectric thin film to an upper portion of the first insulation layer, and extending onto a section of the first insulation layer positioned in the region where the lamination layer film is not present; wherein
a width of the wiring electrode is no less than about 6 ?m.