US Patent No. 10,557,199

HEAT TREATMENT APPARATUS


Patent No. 10,557,199
Issue Date February 11, 2020
Title Heat Treatment Apparatus
Inventorship Masahiro Kikuchi, Oshu (JP)
Assignee TOKYO ELECTRON LIMITED, Tokyo (JP)

Claim of US Patent No. 10,557,199

1. A heat treatment apparatus, comprising:a substantially-cylindrical reaction tube extending in a vertical direction, and configured to accommodate a substrate holder in which a plurality of substrates is stacked in the vertical direction;
a gas supply duct integrally formed with the reaction tube on an outer circumferential wall of the reaction tube to extend in a longitudinal direction of the reaction tube;
gas supply holes configured as pipe lines to bring an interior of the gas supply duct and an interior of the reaction tube into communication with each other, the pipe lines being oriented parallel to one another to supply a gas to the substrates in a mutually-parallel relationship;
a preheating duct integrally formed with the reaction tube on the outer circumferential wall of the reaction tube, and installed so as to extend along the longitudinal direction of the reaction tube up to a predetermined position of a predetermined height existing in a vicinity of an upper end of the outer circumferential wall of the reaction tube;
a connection duct configured to connect the preheating duct and the gas supply duct; and
a pressure-resistant container configured to cover the reaction tube, the gas supply duct and the preheating duct from the outside,
wherein the gas supply holes are formed in a region of the outer circumferential wall of the reaction tube covered with the gas supply duct, and not formed in a region of the reaction tube covered with the preheating duct,
wherein a closed space is formed by the outer circumferential wall of the reaction tube and the preheating duct, and
wherein the gas supply duct and the gas supply holes are formed to cover a mounting region of the substrates mounted on the substrate holder along the longitudinal direction of the reaction tube.