US Patent No. 10,522,708

METHOD OF PREVENTING CONTAMINATION OF LED DIE


Patent No. 10,522,708
Issue Date December 31, 2019
Title Method Of Preventing Contamination Of Led Die
Inventorship Yue Chau Kwan, Singapore (SG)
Li Ma, Singapore (SG)
Liang Zhang, Singapore (SG)
Kenneth Morgan Davis, Raleigh, NC (US)
Bing Xuan Li, Singapore (SG)
Assignee LUMILEDS LLC, San Jose, CA (US)

Claim of US Patent No. 10,522,708

1. A method comprising:(a) providing a wafer comprising an epitaxy layer and a dielectric layer with openings having metal contacts;
(b) depositing a barrier layer on the metal contacts and the dielectric layer;
(c) depositing a patterned photoresistive layer on the barrier layer in regions of the wafer overlaying the metal contact;
(d) depositing a reflective layer on the patterned photoresistive layer and the barrier layer; and
(e) removing the patterned photoresistive layer including portions of the reflective layer overlaying the patterned photoresistive layer.