US Patent No. 10,512,164

MICRO DEVICES FORMED BY FLEX CIRCUIT SUBSTRATES


Patent No. 10,512,164
Issue Date December 17, 2019
Title Micro Devices Formed By Flex Circuit Substrates
Inventorship Stephen A. Marsh, Carlisle, MA (US)
Assignee Encite LLC, Burlington, MA (US)

Claim of US Patent No. 10,512,164

1. A circuit substrate comprises:a plurality of layers of one or more materials, with the plurality of layers adhered together, and with at least a first set of the plurality of layers having patterned electrical conductors thereon; and
a micro electro mechanical device disposed within the circuit substrate, and integrally formed from a second set of the plurality of layers.