US Patent No. 10,512,147

EXTREME ULTRAVIOLET RADIATION SOURCE AND DROPLET CATCHER THEREOF


Patent No. 10,512,147
Issue Date December 17, 2019
Title Extreme Ultraviolet Radiation Source And Droplet Catcher Thereof
Inventorship Chi Yang, Taichung (TW)
Sheng-Ta Lin, Gongguan Township, Miaoli County (TW)
Ssu-Yu Chen, New Taipei (TW)
Shang-Chieh Chien, New Taipei (TW)
Li-Jui Chen, Hsinchu (TW)
Po-Chung Cheng, Zhongpu Shiang (TW)
Assignee TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu (TW)

Claim of US Patent No. 10,512,147

1. An extreme ultraviolet radiation source, comprising:a droplet generator configured to output a plurality of target droplets along a target droplet path that is parallel to a horizontal direction; and
a droplet catcher, comprising:
an open end substantially aligned with the target droplet path;
an enclosed end being opposite to the open end;
a pipe wall disposed between the open end and the enclosed end, wherein the pipe wall includes a first pipe wall portion having an inner top surface parallel to the horizontal direction and an inner bottom surface inclined relative to the inner top surface; and
at least one gutter formed on the inner bottom surface and having a long axis extending along the horizontal direction.