US Patent No. 10,462,856

HIGH FREQUENCY HEATING APPARATUS


Patent No. 10,462,856
Issue Date October 29, 2019
Title High Frequency Heating Apparatus
Inventorship Hoikwan Lee, ChungCheongNam-Do (KR)
Kyungmin Yoon, ChungCheongNam-Do (KR)
Seo-Yeong Cho, ChungCheongNam-Do (KR)
Assignee Corning Precision Materials Co., Ltd., Asan-si, Chungcheongnam-do (KR)

Claim of US Patent No. 10,462,856

1. A high frequency heating apparatus comprising a plurality of high frequency generators disposed over a glass substrate to be carried in a first direction and spaced apart from each other in the first direction, each of the plurality of high frequency generators generating high frequency to heat the glass substrate, the high frequency ranging from 0.98 GHz to 6.0 GHz,wherein a distance from the glass substrate to each of the plurality of high frequency generators is (n?/2)*?, where n? is a natural number ranging from 1 to 6, and ? is a wavelength of the high frequency.