US Patent No. 10,433,370

MICRO MULTI-ARRAY HEATER AND MICRO MULTI-ARRAY SENSOR


Patent No. 10,433,370
Issue Date October 01, 2019
Title Micro Multi-array Heater And Micro Multi-array Sensor
Inventorship Bum Mo Ahn, Suwon-si (KR)
Seung Ho Park, Hwaseong-si (KR)
Sung Hyun Byun, Hwaseong-si (KR)
Assignee Point Engineering Co., Ltd., Asan-si, Chungcheongnam-do (KR)

Claim of US Patent No. 10,433,370

1. A multi-array sensor with a multi-array heater comprising:a substrate, which is an anodic oxide film including a porous layer, obtained by anodizing a metallic base material and then removing the base material; and
heater electrodes formed on the substrate, wherein the heater electrodes include a first heater electrode having a first heat generation pattern and a second heater electrode having a second heat generation pattern, and
the first heat generation pattern and the second heat generation pattern are formed to have different heat generation amounts and different thicknesses.