US Patent No. 10,398,012


Patent No. 10,398,012
Issue Date August 27, 2019
Title X-ray Inspection System
Inventorship Bunta Matsuhana, Kyoto (JP)
Futoshi Ueki, Kyoto (JP)
Assignee Shimadzu Corporation, Kyoto (JP)

Claim of US Patent No. 10,398,012

1. An X-ray inspection system comprising:an X-ray imaging system including an X-ray source that irradiates an inspection object with X-rays and an X-ray detector that detects the X-rays emitted from the X-ray source and passing through the inspection object;
a stage that is disposed between the X-ray source and the X-ray detector, the inspection object being mounted on the stage;
a moving mechanism that relatively moves the stage and the X-ray imaging system;
an X-ray shielding member that is disposed beside a mounting area of the inspection object on the stage; and
a control unit that moves the X-ray imaging system relatively to the stage to an aging position at which the X-ray source and the X-ray shielding member face each other by controlling the moving mechanism when aging is performed on the X-ray source.