US Patent No. 10,367,007

DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME


Patent No. 10,367,007
Issue Date July 30, 2019
Title Display Device And Method Of Manufacturing The Same
Inventorship Youngmin Moon, Seongnam-si (KR)
Assignee Samsung Display Co., Ltd., (KR)

Claim of US Patent No. 10,367,007

1. A method of manufacturing a display device comprising:forming a first conductive layer on a substrate;
forming a second conductive layer on the first conductive layer;
forming a first photoresist pattern on a gate transmission member forming area and a second photoresist pattern on a pixel electrode pattern forming area on the second conductive layer, the second photoresist pattern having a thickness greater than a thickness of the first photoresist pattern;
removing the first and second conductive layers using the first and second photoresist patterns as masks, to thereby form a gate transmission member and a pixel electrode pattern each comprising a first conductive layer pattern and a second conductive layer pattern;
removing the first photoresist pattern to thereby form a residual pattern of the second photoresist pattern on the pixel electrode pattern;
forming an etch stop layer on the gate transmission member and the residual pattern;
removing the residual pattern to thereby form an etch stop layer pattern through which the second conductive layer pattern of the pixel electrode pattern is exposed; and
removing the second conductive layer pattern of the pixel electrode pattern using the etch stop layer pattern as a mask, to thereby form a pixel electrode.