US Patent No. 10,335,945

SUBSTRATE TRANSPORT APPARTATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM


Patent No. 10,335,945
Issue Date July 02, 2019
Title Substrate Transport Appartatus With Multiple Movable Arms Utilizing A Mechanical Switch Mechanism
Inventorship Christopher Hofmeister, Hampstead, NH (US)
Alexander G. Krupyshev, Chelmsford, MA (US)
Krysztof A. Majczak, Beverly, MA (US)
Martin Hosek, Lowell, MA (US)
Jay Krishnasamy, Billerica, MA (US)
Assignee Brooks Automation, Inc., Chelmsford, MA (US)

Claim of US Patent No. 10,335,945

1. A substrate transport apparatus comprising:a drive section having coaxial drive shafts and at least a first and a second independently controllable motor coupled to a respective first and second drive shaft of the coaxial drive shafts;
a first articulated arm having a first arm link and a first end effector connected to the first arm link for holding a substrate thereon;
a second articulated arm having a second arm link and a second end effector connected to the second arm link for holding a substrate thereon; and
each of the first and second arm links being rotatably joined by the coaxial drive shafts to rotors of both of the first and second independently controllable motors such that simultaneous movement of the first and second independently controllable motors effects extension of an extension arm of the first and second articulated arms and rotation of a rotating retracted arm of the first and second articulated arms wherein the first articulated arm is respectively the extension arm while the second articulated arm is the rotating retracted arm and is the rotating retracted arm while the second articulated arm is the extension arm, so that each of the first arm link supporting the first end effector respectively become extension arm links as each of the second arm link supporting the second end effector respectively become rotating retracted arm links and so that each of the second arm link supporting the second end effector respectively become extension arm links as each of the first arm link supporting the first end effector respectively become rotating retracted arm links that are rotated in a substantially retracted configuration so that each of the rotating retracted arm links of the rotating retracted arm being rotated in the substantially retracted configuration, is maintained in a substantially constant position, with respect to each other rotating retracted arm link of the rotating retracted arm being rotated in the substantially retracted configuration, by a common drive shaft, of the coaxial drive shafts, rotating in a common direction relative to and substantially simultaneously with the rotating retracted arm effecting extension of the extension arm with rotation of the rotating retracted arm being rotated in the substantially retracted configuration.