US Patent No. 10,251,254

EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS AND CONTROL METHOD FOR CENTROID OF EXTREME ULTRAVIOLET LIGHT


Patent No. 10,251,254
Issue Date April 02, 2019
Title Extreme Ultraviolet Light Generating Apparatus And Control Method For Centroid Of Extreme Ultraviolet Light
Inventorship Yuichi Nishimura, Oyama (JP)
Takayuki Yabu, Oyama (JP)
Assignee Gigaphoton Inc., Tochigi (JP)

Claim of US Patent No. 10,251,254

1. An extreme ultraviolet light generating apparatus comprising:a plurality of EUV light sensors configured to measure energy of extreme ultraviolet light from mutually different directions, the extreme ultraviolet light being generated by applying laser light to a target supplied to a predetermined region in a chamber;
an application position adjusting unit configured to adjust an application position of the laser light to the target supplied to the predetermined region; and
a controller configured to control the application position adjusting unit such that a centroid of the extreme ultraviolet light becomes a targeted centroid, the centroid of the extreme ultraviolet light being specified from measurement results of the EUV light sensors,
the controller
controlling the application position adjusting unit such that the application position is scanned in accordance with a plurality of reference scan points that are mutually different in position, and
calibrating the targeted centroid based on the measurement results acquired for the reference scan points.