US Patent No. 10,214,834

MONOCRYSTAL GROWTH SYSTEM AND METHOD CAPABLE OF CONTROLLING SHAPE OF INGOT INTERFACE


Patent No. 10,214,834
Issue Date February 26, 2019
Title Monocrystal Growth System And Method Capable Of Controlling Shape Of Ingot Interface
Inventorship In-Sik Bang, Gumi-si (KR)
Assignee SK SILTRON CO., LTD., Gumi-Si, Gyeongsangbuk-Do (US)

Claim of US Patent No. 10,214,834

1. A monocrystal growing system as a system of controlling a growth interface shape by pulling up and growing a monocrystal ingot in a process chamber by a Czochralski method, the system comprising:an ingot weight measuring part for measuring a weight of a growing ingot;
an ingot diameter measuring part for measuring a diameter of the growing ingot;
an ingot height measuring part for measuring a height of the growing ingot;
a comparing part configured to compare a measurement value obtained by measuring a weight increase amount of the ingot for unit time and a theoretical value of the ingot weight increase amount derived through a change in the diameter and the height of the ingot for the unit time; and
a control part configured to predict a prediction result for a growth interface shape of the ingot to be grown according to a difference between the measurement value and the theoretical value derived from the comparing part and to change a process condition during monocrystal ingot growth according to the prediction result for the growth interface shape of the ingot.