US Patent No. 10,214,813

APPARATUS AND METHOD FOR PROVIDING A COATING TO A SURFACE OF A SUBSTRATE


Patent No. 10,214,813
Issue Date February 26, 2019
Title Apparatus And Method For Providing A Coating To A Surface Of A Substrate
Inventorship Leif Keto, Espoo (FI)
Assignee BENEQ OY, Espoo (FI)

Claim of US Patent No. 10,214,813

1. An apparatus for providing a coating to a surface of a substrate, the apparatus comprising:at least one ALD-coating unit in which the surface of the substrate is subjected to successive surface reactions of at least a first precursor and a second precursor according to principles of atomic layer deposition for coating the surface of the substrate;
a first reel for unwinding the substrate to be coated;
a second reel for rewinding the coated substrate;
one or more primary support structures provided on the same side of the substrate as the surface to be coated or the coated surface for forming a substrate transport path from the first reel through the at least one primary support structure to the second reel;
an interleave web in connection with each of the one or more primary support structures, said interleave web is arranged to protect the surface to be coated or the coated surface when the substrate is passing through the one or more primary support structures, said interleave web is arranged to move together with the substrate along at least part of the substrate transport path, the interleave web is arranged between each of the one or more primary support structures and the surface to be coated or the coated surface such that the surface to be coated or the coated surface is arranged to contact only with the interleave web along the substrate transport path from the first reel to the second reel; and
one or more primary interleave unwinding reels comprising the interleave web for unwinding the interleave web, said one or more primary interleave unwinding reels is arranged such that the interleave web is brought together with the substrate supplied from the first reel before or at the first primary support structure in which the interleave web is arranged between the surface to be coated and the primary support structure.