US Patent No. 10,172,189

METHOD AND APPARATUS FOR MICROWAVE TREATMENT OF DIELECTRIC FILMS


Patent No. 10,172,189
Issue Date January 01, 2019
Title Method And Apparatus For Microwave Treatment Of Dielectric Films
Inventorship Iftikhar Ahmad, Raleigh, NC (US)
Assignee APPLIED MATERIALS, INC., Santa Clara, CA (US)

Claim of US Patent No. 10,172,189

1. An apparatus for thermal treatment of dielectric films on substrates comprising:a microwave applicator cavity to apply microwaves to a workpiece disposed within the microwave applicator cavity to heat the workpiece, the workpiece comprising a porous coating on a selected substrate;
a microwave power source to deliver power to the applicator cavity;
a jar located within the microwave applicator cavity and,
a dispenser located within the jar and positioned above the surface of the porous coating for introducing a controlled amount of a polar solvent into the porous coating immediately before heating by the microwave power.