US Patent No. 10,169,510
DYNAMIC FAULT MODEL GENERATION FOR DIAGNOSTICS SIMULATION AND PATTERN GENERATION
| Patent No. | 10,169,510 |
|---|---|
| Issue Date | January 01, 2019 |
| Title | Dynamic Fault Model Generation For Diagnostics Simulation And Pattern Generation |
| Inventorship | Mary P. Kusko, Hopewell Junction, NY (US) Gary W. Maier, Poughkeepsie, NY (US) Franco Motika, Hopewell Junction, NY (US) Phong T. Tran, Highland, NY (US) |
| Assignee | INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US) |
Claim of US Patent No. 10,169,510
1. A computer implemented method for locating defects in a fabricated device, the method comprising:inputting, by a computer system, inline fabrication parametric data, the inline fabrication parametric data is a collection of physical measurements measured on the fabricated device during stages of building process layers in the fabricated device, wherein a fault model is based on the inline fabrication parametric data;
generating, by the computer system, test patterns according to inline fabrication parametric data of the fabricated device according to the fault model in order to obtain results from testing the fabricated device; and
detecting a physical location of one or more defects in the fabricated device by running a simulation of the fabricated device using the results.
generating, by the computer system, test patterns according to inline fabrication parametric data of the fabricated device according to the fault model in order to obtain results from testing the fabricated device; and
detecting a physical location of one or more defects in the fabricated device by running a simulation of the fabricated device using the results.